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사업영역

국내 Gas 장비산업을 선도하는 원익홀딩스입니다.

Gas Supply System

Gas Supply System
  • Gas Cabinet, Bundle
  • BSGS (Bulk Specialty Gas System)
  • VMB & VMP(Valve Manifold Box & Panel)

Gas Purifier Unit-General

Gas Purifier Unit-General
  • AGT (Getter Type)
  • AMG & APG (Getter Type)
  • ALP (Line Purifier)
  • ACA (Catalyst Absorber)
  • ACG (Catalyst Absorber)

Special Gas Purifier & Chamber(Glove Box)

Special Gas Purifier & Chamber(Glove Box)
  • Circulation Purifier & Chamber (OLED)
  • NH3 Purifier(100m3/hr)
  • Line Purifier(NH3,HCl,TCS etc.)

Precursor  Supply System

Precursor Supply System
  • ARS(Auto Refill System)
  • Precursor Supply System
    (TEOS, LTO520,HCDS, ECH,TICL4 etc.)

Specialty Gas Piping

Specialty Gas Piping
  • Utility Construction
  • 2nd & 3rd Level Piping

GMS (Gas Monitoring System)

GMS (Gas Monitoring System)